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News

BOC Edwards, Accentus to develop plasma abatement system

BOC Gases : 16 July, 2001  (Company News)
BOC Edwards, a major supplier of exhaust management systems, announced today that they have entered into a joint development program and exclusive licensing agreement with Accentus plc, a wholly-owned subsidiary of AEA Technology plc. The two companies have agreed to develop and market a plasma abatement system that will destroy a wide selection of PFC gases used in the semiconductor industry.
BOC Edwards, a major supplier of exhaust management systems, announced today that they have entered into a joint development program and exclusive licensing agreement with Accentus plc, a wholly-owned subsidiary of AEA Technology plc. The two companies have agreed to develop and market a plasma abatement system that will destroy a wide selection of PFC gases used in the semiconductor industry.

“This technology should assist the industry in meeting its PFC emission reduction targets cost effectively, thus ensuring the World Semiconductor Council goals for 2010 are achieved” said Bob Smith, General Manager of the Exhaust Management Division at BOC Edwards.

Based on the patented and proven methodology developed by scientists at Accentus, very high abatement of CF4 in flows up to 500sccm have been demonstrated. The technique utilizes very low electrical power (approx. 1kW) to achieve abatement in up to four dielectric etch chambers simultaneously. The new plasma system will undergo reliability trials and beta site testing prior to its targeted 2002 introduction.
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