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News

Quadrant EPP introduces next generation of retaining ring materials for semiconductor manufacturing

Quadrant EPP : 07 June, 2006  (New Product)
Longer production life for semiconductor chemical mechanical planarization retaining rings is possible with new materials available from Quadrant Engineering Plastic Products. Semitron CMP LL5 and Semitron CMP XL20, offer service life up to 20 times greater than materials currently used to make retaining rings. The materials are available in stock shapes specifically for precision machined parts for critical tolerance CMP applications.
In introducing the new materials, Fred Sanford, Semiconductor Business Manager, said, 'For years, engineers have been working with us to develop ongoing improvements in materials that extend production life and reduce costs of their CMP retaining rings. We're pleased to announce the next generation in our evolving product line that can reduce the cost of currently-used polyphenylene sulfide consumable rings by half and improve production life by a factor of 20 or more, depending on the material and the process environment.'

Semitron CMP LL5 is an enhanced polyester. Laboratory simulations show that Semitron CMP LL5 extends retainering ring-life by as much as 5 times over rings made of PPS, depending on process conditions. Semitron CMP LL5, a lower cost alternative to PPS and suitable for use in all CMP processes, is ideal for use in ring designs that have steel or ceramic reinforcement.

Semitron CMP XL20 is a modified polyamide-imide. Semitron CMP XL20 consistently outlasts all other engineering plastics in all major process environments and, compared to PPS, lasts up to 20 times longer. Semitron CMP XL20 has the optimum combination of long life in use and mechanical properties needed in demanding process environments. 'Semitron CMP XL20,' said Sanford, 'is the magic bullet for very demanding applications. It is the next generation standard, and it is available today.'

The new grades are the most recent additions to Quadrant EPP's line of stock shapes for machining into precision components used in semiconductor manufacturing and testing equipment. Most notably, Quadrant's Teether PPS is considered today's premium material for extended life in CMP applications industry wide. It outperforms other retaining-ring materials, including acetal (POM) and polyester (PET) with its higher stiffness, tighter retention of critical tolerances and broader resistance to polishing media and pro-cess chemicals,

Quadrant EPP's machining stock shape products range from Nylatron nylons and Acetron acetal to ultra-high performance polymers that resist temperatures over 800 F (425 C). Major uses include bearing and wear components in equipment for industrial production, food processing, packaging, semiconductor manufacturing, chemical processing, fluid management and power generation, and applications in the aerospace, electronics and life sciences industries. A worldwide technical service team supports engineers and machinists in material selection, application development and parts production.
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