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News

Rodel solidifies position in direct STI slurry market with new Celexis slurry

Rohm & Haas Co : 03 December, 2003  (New Product)
Rodel, Inc., a leader and innovator in polishing technology for the global semiconductor industry, today introduced Celexis slurry for direct shallow trench isolation, reinforcing the company's position in the STI slurry market. Celexis slurry is a high selectivity, low defectivity slurry that provides excellent planarization and clearing.
Rodel, Inc., a leader and innovator in polishing technology for the global semiconductor industry, today introduced Celexis slurry for direct shallow trench isolation, reinforcing the company's position in the STI slurry market. Celexis slurry is a high selectivity, low defectivity slurry that provides excellent planarization and clearing.

As a one-step replacement for multiple-step reverse mask processes, direct STI delivers improved performance and enables lower costs. 'With new design rules requiring tighter shallow trench isolation control, more companies are migrating to direct STI,' said Rich Baker, vice president of slurry R&D at Rodel. 'The addition of Celexis slurry rounds out Rodel's complete package of solutions for direct STI CMP and solidifies its position in this market.'

Celexis slurry features the NanoArc Synthesis cerium oxide particle from Nanophase Technologies Corp. In a strategic alliance, Rodel worked with Nanophase on the final development of this novel particle, modifying the ceria particle to optimize its performance for use in CMP applications. This ceria particle, when combined with Rodel's formulation expertise and CMP process integration knowledge, provides state-of-the-art direct STI performance via excellent consistency, stability and defectivity.

'Celexis slurry is a ceria-based high selectivity slurry that provides excellent planarization and clearing behavior while delivering silica-like defectivity, an attractive combination not typically found in current STI slurries,' Mr. Baker said. 'This enables our customers to meet future STI dishing and erosion targets with higher yields.'
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