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News

Semiconductor Group continues to provide semiconductor wafer processing industry wit seal solutions

Greene Tweed & Co Benelux BV : 08 September, 2006  (New Product)
Greene, Tweed's Semiconductor Group continues to provide the semiconductor wafer processing industry with innovative seal solutions with the introduction of a new perfluoroelastomer - Chemraz 639.
Greene, Tweed's Semiconductor Group continues to provide the semiconductor wafer processing industry with innovative seal solutions with the introduction of a new perfluoroelastomer - Chemraz 639.

Chemraz 639 perfluoroelastomer is specifically formulated by Greene, Tweed to meet the rigorous demands of aggressive plasma systems. This product's unique formulation provides a balance of physical properties plus exceptional plasma resistance and reduced contamination particularly in oxygen and fluorine processing environments. Chemraz 639 'cleanliness' is enhanced by its very low metallic ion content (<7000 ppb) resulting in less downtime and a lower cost of ownership. Chemraz 639 is recommended for both static and dynamic dry wafer processing applications such as etch and CVD. Chemraz 639 remains stable at service temperatures up to 260C.
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