CHARTERED 300 MM FAB SELECTS ASML FOR MULTI-SYSTEM TOOL PURCHASE
25 March 2004 - ASML Netherlands B.V.

ASML Holding NV today announced that it won an order for a suite of lithography tools from Chartered Semiconductor Manufacturing, one of the world's top three dedicated semiconductor foundries, headquartered in Singapore. This multi-system sale further expands ASML’s installed base in Asia and secures ASML’s place as the leading provider of 300 mm equipment with systems in 20 of the world’s 29 300 mm fabs.

Chartered purchased the full range of ASML’s TWINSCAN systems, including I-line, KrF and ArF tools. Chartered also acquired a Scattering Bar IP License from ASML MaskTools.

"The starting of operations at our first 300 mm fab marks a significant milestone in Chartered’s growth. ASML’s leading-edge technology capabilities and innovations have played an important role in our existing fabs and we’re pleased to expand our collaboration with ASML as we embark on 300 mm manufacturing," said Kay Chai "KC" Ang, senior vice president, fab operations at Chartered.

"ASML supports foundries like Chartered by delivering platforms that extend technology, improve productivity and increase manufacturing flexibility," said Doug Dunn, president and CEO, ASML. "The selection of ASML by Chartered extends a strong, working relationship between our two companies. ASML looks forward to helping Chartered’s 300 mm fab achieve a fast and smooth ramp up into full production."

http://www.asml.com

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