BOC EDWARDS ANNOUNCES NEW LIQUID ABATEMENT SYSTEM FOR METAL ELECTROPLATING WASTE

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BOC EDWARDS ANNOUNCES NEW LIQUID ABATEMENT SYSTEM FOR METAL ELECTROPLATING WASTE
19 September 2006 - BOC Gases

BOC Edwards, a leading supplier of vacuum and abatement equipment to the world’s 300 mm semiconductor fabs, announced today the release of its new electroplated metals abatement system product, which offers simplified liquid waste treatment and lower cost of ownership than conventional approaches. The first system has been installed and is operational in a major US electronics manufacturing facility where it processes metal laden waste streams from both CMP and multiple plating operations in a single integrated process.

“EPMA greatly simplifies the task of managing waste from electrochemical deposition processes,” said Phil Chandler, general manager liquid abatement, BOC Edwards. “An EPMA system treats multiple waste streams from CMP and plating operations. EPMA generates an easy-to-handle, highly concentrated liquid waste, unlike traditional methods that involve either transporting large volumes of material for off-site processing or managing multiple precipitation based processes, and the solid waste that they create.”

Metallization steps for semiconductor, MRAM, disk platen, and disk head manufacturing produce large volumes of dilute waste with relatively low concentrations of metals including copper, nickel, cobalt and iron. These wastes are produced by post-plating rinse and by planarization steps. Most of the metals are regulated and must be removed before the liquid waste can be discharged. However, the large volumes and dilute concentrations make traditional treatment methods such as precipitation, economically less viable.

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About: BOC Gases
Through its PGS line of business, BOC supplies gas and related solutions to the chemicals, petroleum, glass, water services, electronic packaging, fibre optics, hydrogen energy, metals and food industries. BOC helps meet customer needs in a variety of ways, from the supply of a single gas or application through to designing, constructing and operating fully integrated gas and utilities schemes.

The BOC Group, which serves two million customers in more than 50 countries, is one of the largest and most global of the world's leading gases companies. It employs some 44,500 people worldwide and had annual sales of over £4.3 billion in 2003. Further information about The BOC Group may be obtained on the Internet at www.boc.com

The BOC Group has an international portfolio of companies grouped for management control and reporting into three lines of business: Process Gas Solutions, Industrial and Special Products, and BOC Edwards. It also has a specialist logistics business, Gist.

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