BOC EDWARDS & AIXTRON ENTER INTO SUPPLY ARRANGEMENT FOR INTEGRATED VACUUM PUMP & ABATEMENT SYSTEM

Main Menu | News By Date | News By Supplier | News By Category | About Us

BOC EDWARDS & AIXTRON ENTER INTO SUPPLY ARRANGEMENT FOR INTEGRATED VACUUM PUMP & ABATEMENT SYSTEM
16 September 2006 - BOC Gases

BOC Edwards announced today that it has entered into an agreement with AIXTRON AG, a leading manufacturer of metal-organic chemical vapor deposition process tools, to supply its Zenith III-V integrated pump and abatement system to compound semiconductor customers for arsenide and phosphide MOCVD applications.

“This arrangement is intended to provide our customers with many benefits including savings associated with rapid installation of a fully functional turnkey vacuum and abatement subsystem interfaced to the process tool, and released by AIXTRON to be compatible with their system,” said Brian Emslie, semiconductor business development director at BOC Edwards. “AIXTRON’s technical leadership in the compound semiconductor market combined with our worldwide support infrastructure gives customers the ability to source the process tool, vacuum pumping and exhaust system from a single source, aiming to ensure maximum uptime and improved maintenance intervals.”

The Zenith III-V is a fully integrated abatement and pump solution for MOCVD applications incorporating inward-fired combustion technology (Helios), reliable iH Series dry pumps, pipework heating and an integrated control strategy. The system provides high-quality treatment of toxic, compound semiconductor process exhaust gases and organometallic precursors in addition to the handling of hydrogen flows.

Dr. Frank Schulte, senior department manager, product marketing at AIXTRON said, “This is an important addition to our existing capabilities as the leading tool supplier for phosphide applications in the compound semiconductor market. BOC Edwards’ key role as a dry vacuum pump and abatement solutions provider combined with its global service infrastructure footprint means that we are collaborating with an important subsystem supplier to better serve our customers. We expect they will achieve improved cost of ownership from this integrated approach.”

BOC Edwards will continue to sell its full range products and services directly to end users for all other applications.

http://www.boc.com

About: BOC Gases
Through its PGS line of business, BOC supplies gas and related solutions to the chemicals, petroleum, glass, water services, electronic packaging, fibre optics, hydrogen energy, metals and food industries. BOC helps meet customer needs in a variety of ways, from the supply of a single gas or application through to designing, constructing and operating fully integrated gas and utilities schemes.

The BOC Group, which serves two million customers in more than 50 countries, is one of the largest and most global of the world's leading gases companies. It employs some 44,500 people worldwide and had annual sales of over £4.3 billion in 2003. Further information about The BOC Group may be obtained on the Internet at www.boc.com

The BOC Group has an international portfolio of companies grouped for management control and reporting into three lines of business: Process Gas Solutions, Industrial and Special Products, and BOC Edwards. It also has a specialist logistics business, Gist.

More News:
  • For September 2006
  • From BOC Gases
  • For Gases