NEW GENERATION-F DESIGNED TO LOWER CHAMBER CLEANING COST OF OWNERSHIP

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NEW GENERATION-F DESIGNED TO LOWER CHAMBER CLEANING COST OF OWNERSHIP
22 September 2006 - BOC Gases

BOC Edwards, a leading supplier of materials, equipment and services to the flat panel display manufacturing industry, announced today the launch of the Generation-F 1600, a new addition to its family of on-site fluorine generators. The Generation-F 1600 will be introduced at FPD TAIWAN 2005.

Development of this system follows the introduction of the Generation-F80 and the Generation-F400, the first commercial on-site fluorine generators specifically designed for the chemical-vapor deposition chamber cleaning market. The Generation-F1600 integrates on-demand electrolytic fluorine production with purification and compression in a compact, ventilated enclosure and delivers up to 65 kg of high-purity fluorine per day to the process tool. With its high capacity output, the Generation-F1600 is the first BOC Edwards generator specifically designed to support fluorine plasma cleaning of liquid crystal display tool platforms. “The new Generation-F 1600 is designed to drive down the cost of cleaning the larger sized CVD chambers used in Generation 6, 7 and 8 fabs,” said Graham Hodgson, BOC Edwards general manager, fluorine.

“We’re looking forward to showing FPD Taiwan visitors this exciting addition to our product line,” Hodgson said, “and demonstrating how this high- flow system reduces chamber cleaning cost of ownership versus nitrogen trifluoride for the large scale cleaning applications used in the LCD industry.”

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About: BOC Gases
Through its PGS line of business, BOC supplies gas and related solutions to the chemicals, petroleum, glass, water services, electronic packaging, fibre optics, hydrogen energy, metals and food industries. BOC helps meet customer needs in a variety of ways, from the supply of a single gas or application through to designing, constructing and operating fully integrated gas and utilities schemes.

The BOC Group, which serves two million customers in more than 50 countries, is one of the largest and most global of the world's leading gases companies. It employs some 44,500 people worldwide and had annual sales of over £4.3 billion in 2003. Further information about The BOC Group may be obtained on the Internet at www.boc.com

The BOC Group has an international portfolio of companies grouped for management control and reporting into three lines of business: Process Gas Solutions, Industrial and Special Products, and BOC Edwards. It also has a specialist logistics business, Gist.

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