SUCCESSFUL QUALIFICATION PROGRAM INDICATES F80 GOOD COMPLEMENT TO TELFORMULA PLATFORM

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SUCCESSFUL QUALIFICATION PROGRAM INDICATES F80 GOOD COMPLEMENT TO TELFORMULA PLATFORM
27 September 2006 - BOC Gases

BOC Edwards, a global supplier of materials and subsystems for electronics manufacturing, announced today it has successfully completed a two-year fluorine qualification program with Tokyo Electron Limited, Japan, a major manufacturer of semiconductor production equipment. The BOC Edwards' Generation-F80 prototype fluorine generator has supplied up to 80 l/hr to multiple TELFORMULA 300 mm LPCVD tools at TEL/AT's Tohoku, Japan facility.

"We have experienced good cleaning performance in the process developed for the TELFORMULA tool using BOC Edwards on-site fluorine generation system," said Yasuyuki Kuriki, TEL vice president and general manager, thermal processing systems. "On-site fluorine generation represents a new paradigm for the industry's chamber cleaning requirements, and BOC Edwards has brought excellent service and fluorine expertise to the effort."

On-site fluorine generation provides the semiconductor industry with an alternative to PFC-based chamber cleans. BOC Edwards has developed fluorine supply solutions that incorporate product delivery, maintenance, service and abatement components. "Fluorine gas supplied in this way has the potential to offer a substantial reduction in the cost of ownership compared with other perfluorocarbons and cylinder fluorine," said Noel Leeson, president of electronic materials for BOC Edwards. “Our experience in providing fluorine generation systems includes commercial installations in 300 mm production fabs and large-scale systems for LCD plants."

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About: BOC Gases
Through its PGS line of business, BOC supplies gas and related solutions to the chemicals, petroleum, glass, water services, electronic packaging, fibre optics, hydrogen energy, metals and food industries. BOC helps meet customer needs in a variety of ways, from the supply of a single gas or application through to designing, constructing and operating fully integrated gas and utilities schemes.

The BOC Group, which serves two million customers in more than 50 countries, is one of the largest and most global of the world's leading gases companies. It employs some 44,500 people worldwide and had annual sales of over £4.3 billion in 2003. Further information about The BOC Group may be obtained on the Internet at www.boc.com

The BOC Group has an international portfolio of companies grouped for management control and reporting into three lines of business: Process Gas Solutions, Industrial and Special Products, and BOC Edwards. It also has a specialist logistics business, Gist.

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