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BOC EDWARDS, ACCENTUS TO DEVELOP PLASMA ABATEMENT SYSTEM
16 July 2001 - BOC Gases
| BOC Edwards, a major supplier of exhaust management systems, announced today that they have entered into a joint development program and exclusive licensing agreement with Accentus plc, a wholly-owned subsidiary of AEA Technology plc. The two companies have agreed to develop and market a plasma abatement system that will destroy a wide selection of PFC gases used in the semiconductor industry. |
BOC Edwards, a major supplier of exhaust management systems, announced today that they have entered into a joint development program and exclusive licensing agreement with Accentus plc, a wholly-owned subsidiary of AEA Technology plc. The two companies have agreed to develop and market a plasma abatement system that will destroy a wide selection of PFC gases used in the semiconductor industry. “This technology should assist the industry in meeting its PFC emission reduction targets cost effectively, thus ensuring the World Semiconductor Council goals for 2010 are achieved” said Bob Smith, General Manager of the Exhaust Management Division at BOC Edwards. Based on the patented and proven methodology developed by scientists at Accentus, very high abatement of CF4 in flows up to 500sccm have been demonstrated. The technique utilizes very low electrical power (approx. 1kW) to achieve abatement in up to four dielectric etch chambers simultaneously. The new plasma system will undergo reliability trials and beta site testing prior to its targeted 2002 introduction.
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About: BOC Gases
Through its PGS line of business, BOC supplies gas and related solutions to the chemicals, petroleum, glass, water services, electronic packaging, fibre optics, hydrogen energy, metals and food industries. BOC helps meet customer needs in a variety of ways, from the supply of a single gas or application through to designing, constructing and operating fully integrated gas and utilities schemes.The BOC Group, which serves two million customers in more than 50 countries, is one of the largest and most global of the world's leading gases companies. It employs some 44,500 people worldwide and had annual sales of over £4.3 billion in 2003. Further information about The BOC Group may be obtained on the Internet at www.boc.com The BOC Group has an international portfolio of companies grouped for management control and reporting into three lines of business: Process Gas Solutions, Industrial and Special Products, and BOC Edwards. It also has a specialist logistics business, Gist. |
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