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News

BOC Edwards & AIXTRON Enter into Supply Arrangement for Integrated Vacuum Pump & Abatement System

BOC Gases : 16 September, 2006  (Company News)
BOC Edwards announced today that it has entered into an agreement with AIXTRON AG, a leading manufacturer of metal-organic chemical vapor deposition process tools, to supply its Zenith III-V integrated pump and abatement system to compound semiconductor customers for arsenide and phosphide MOCVD applications.
“This arrangement is intended to provide our customers with many benefits including savings associated with rapid installation of a fully functional turnkey vacuum and abatement subsystem interfaced to the process tool, and released by AIXTRON to be compatible with their system,” said Brian Emslie, semiconductor business development director at BOC Edwards. “AIXTRON’s technical leadership in the compound semiconductor market combined with our worldwide support infrastructure gives customers the ability to source the process tool, vacuum pumping and exhaust system from a single source, aiming to ensure maximum uptime and improved maintenance intervals.”

The Zenith III-V is a fully integrated abatement and pump solution for MOCVD applications incorporating inward-fired combustion technology (Helios), reliable iH Series dry pumps, pipework heating and an integrated control strategy. The system provides high-quality treatment of toxic, compound semiconductor process exhaust gases and organometallic precursors in addition to the handling of hydrogen flows.

Dr. Frank Schulte, senior department manager, product marketing at AIXTRON said, “This is an important addition to our existing capabilities as the leading tool supplier for phosphide applications in the compound semiconductor market. BOC Edwards’ key role as a dry vacuum pump and abatement solutions provider combined with its global service infrastructure footprint means that we are collaborating with an important subsystem supplier to better serve our customers. We expect they will achieve improved cost of ownership from this integrated approach.”

BOC Edwards will continue to sell its full range products and services directly to end users for all other applications.
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