Free Newsletter
Register for our Free Newsletters
Newsletter
Zones
Advanced Composites
LeftNav
Aerospace
LeftNav
Amorphous Metal Structures
LeftNav
Analysis and Simulation
LeftNav
Asbestos and Substitutes
LeftNav
Associations, Research Organisations and Universities
LeftNav
Automation Equipment
LeftNav
Automotive
LeftNav
Biomaterials
LeftNav
Building Materials
LeftNav
Bulk Handling and Storage
LeftNav
CFCs and Substitutes
LeftNav
Company
LeftNav
Components
LeftNav
Consultancy
LeftNav
View All
Other Carouselweb publications
Carousel Web
Defense File
New Materials
Pro Health Zone
Pro Manufacturing Zone
Pro Security Zone
Web Lec
Pro Engineering Zone
 
 
 
News

BOC Edwards announces new liquid abatement system for metal electroplating waste

BOC Gases : 19 September, 2006  (New Product)
BOC Edwards, a leading supplier of vacuum and abatement equipment to the world
BOC Edwards, a leading supplier of vacuum and abatement equipment to the world’s 300 mm semiconductor fabs, announced today the release of its new electroplated metals abatement system product, which offers simplified liquid waste treatment and lower cost of ownership than conventional approaches. The first system has been installed and is operational in a major US electronics manufacturing facility where it processes metal laden waste streams from both CMP and multiple plating operations in a single integrated process.

“EPMA greatly simplifies the task of managing waste from electrochemical deposition processes,” said Phil Chandler, general manager liquid abatement, BOC Edwards. “An EPMA system treats multiple waste streams from CMP and plating operations. EPMA generates an easy-to-handle, highly concentrated liquid waste, unlike traditional methods that involve either transporting large volumes of material for off-site processing or managing multiple precipitation based processes, and the solid waste that they create.”

Metallization steps for semiconductor, MRAM, disk platen, and disk head manufacturing produce large volumes of dilute waste with relatively low concentrations of metals including copper, nickel, cobalt and iron. These wastes are produced by post-plating rinse and by planarization steps. Most of the metals are regulated and must be removed before the liquid waste can be discharged. However, the large volumes and dilute concentrations make traditional treatment methods such as precipitation, economically less viable.
Bookmark and Share
 
Home I Editor's Blog I News by Zone I News by Date I News by Category I Special Reports I Directory I Events I Advertise I Submit Your News I About Us I Guides
 
   Â© 2012 NewMaterials.com
Netgains Logo