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Development agreement to produce formulated 157 nanometer photoresists & anti-reflective coatings

Rohm & Haas Co : 15 January, 2001  (New Product)
DuPont iTechnologies and Shipley, today announced that they have signed a joint development agreement to produce fully formulated 157 nanometer photoresists and anti-reflective coatings which will be used to make future generations of semiconductor chips. Details of the agreement were not disclosed.
The companies expect to bring this technology to market by 2003.

As part of the agreement, Shipley becomes the first licensee of DuPont proprietary fluoropolymer binder resin technology, one of the critical ingredients in leading-edge products for micro-lithography. Both companies are actively seeking semiconductor device manufacturing partners to support this development effort.

The agreement will allow the companies to take a step closer to commercializing products that extend Moore's Law, which states that the number of transistors on a computer chip doubles every 12 to 18 months, thus increasing manufacturing productivity and chip performance. Today's most advanced chips have features as small as 130 nanometers. To reduce the feature size to 70 nanometers, which would more than triple the number of transistors on a chip, requires a new form of micro-lithography at 157 nanometer wavelength, including new photoresists and anti-reflective coatings. Seventy nanometers is approximately one thousandth the diameter of a typical human hair.

'We are very pleased to have Shipley as the first licensee for our proprietary technology,' said John C. Hodgson, group vice president and general manager - DuPont iTechnologies. 'DuPont has pioneered the development and production of leading-edge photopolymers and fluoropolymers and, coupled with Shipley's expertise in developing and manufacturing photoresists, this latest breakthrough will provide the enabling technology to extend Moore's Law for the next generation of faster, more powerful computer chips.'

'DuPont iTechnologies will be a wonderful partner on this project,' said Stephen Robinson, president of Shipley Microelectronics and vice president of Rohm and Haas Company. 'DuPont fluoropolymer technology is unique and well-known within the industry. We believe it is a perfect fit with our photoresist technology expertise.'

Shipley Microelectronics is one segment of the $1.2 billion Electronic Materials Business Group of Rohm and Haas, which also includes divisions that focus on the printed wiring board market (Shipley Ronal) and Electronic and Industrial Finishing. The Electronic Materials Business Group also includes Rodel, a market leader for chemical mechanical planarization technology used in the manufacture of semiconductors. Rohm and Haas ( is a Philadelphia-based specialty chemical company which makes products that quietly improve the quality of life through products for the personal care, home and construction markets, as well as agriculture and the electronics industry. The company has annual sales of approximately $7 billion and operations in 27 countries.

DuPont iTechnologies is a $1.5 billion segment that consists of six business units dedicated to the information technology industry, including displays, photoresists, high-performance and microcircuit materials, and proofing and packaging graphics products. DuPont ( is a science company, delivering science-based solutions that make a difference in people's lives in food and nutrition; health care; apparel; home and construction; electronics; and transportation. Founded in 1802, the company operates in 70 countries and has 94,000 employees.

Rohm and Haas Forward-Looking Statement: This release may include forward-looking statements. Actual results may vary materially, due to changes in technology, market dynamics, competitive pressures, and global economic demand. Additional factors that could affect future expectations are detailed in Rohm and Haas's filings with the Securities and Exchange Commission, including the Form 10-Q for the third quarter of 2000.
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