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News

FLUENT and PLASMATOR are bundled to offer comprehensive plasma discharge modeling capabilities

Fluent : 20 September, 2001  (New Product)
Fluent Inc. and Kinema Research & Software, announce the release of FLUENT-PLASMATOR, a comprehensive plasma discharge modeling software for semiconductor manufacturing. Chemically reacting plasma discharges are an indispensable part of integrated circuit fabrication technology. By combining the strengths of the FLUENT and PLASMATOR programs, the bundled product provides the tools needed for reliable semiconductor manufacturing simulation. 'By partnering with Kinema we can offer the IC fabrication industry detailed insight into their plasma processes, such as plasma-enhanced CVD and plasma etching systems. Both semiconductor equipment manufacturers and chip makers will benefit,' explains Eric Grald, manager of Fluent's Materials Processing Industry Team.
Fluent Inc. and Kinema Research & Software, announce the release of FLUENT-PLASMATOR, a comprehensive plasma discharge modeling software for semiconductor manufacturing. Chemically reacting plasma discharges are an indispensable part of integrated circuit fabrication technology. By combining the strengths of the FLUENT and PLASMATOR programs, the bundled product provides the tools needed for reliable semiconductor manufacturing simulation. 'By partnering with Kinema we can offer the IC fabrication industry detailed insight into their plasma processes, such as plasma-enhanced CVD and plasma etching systems. Both semiconductor equipment manufacturers and chip makers will benefit,' explains Eric Grald, manager of Fluent's Materials Processing Industry Team.

Comprehensive Plasma Chemistry
One key to reliable plasma simulation is a detailed and accurate description of the finite rate plasma chemistry. PLASMATOR provides a complete chemistry database, including collision cross-sections, attachment, recombination, ionization and dissociation. Extensive reaction sets can include 100 reactions and as many as 50 species.

Flexible Discharge Models
PLASMATOR accurately and efficiently models both inductively and capacitively coupled plasma discharges using reaction rates based on a Maxwellian or non-Maxwellian energy distribution and experimentally measured collision cross sections. PLASMATOR has the capability to model multiple sets of inductive coils or electrodes with separate driving frequencies and power.

3-Dimensional Modeling of Neutral Flows
To understand the interaction between the plasma discharge and the flow of neutral species in the reactor, PLASMATOR results are used by FLUENT to solve the three-dimensional velocity, pressure, temperature, and species concentrations. The magnitude and distribution of the resulting deposition (or etching) rate are also computed. To keep computational times low, a reduced set of chemical species is used by FLUENT. The reduced chemistry models have been carefully developed to faithfully reproduce the key aspects of the complete plasma chemistry.

'FLUENT-PLASMATOR gives fast turnaround by providing the right tool for each phase of the simulation, and presents reliable results that have been tested against key reference test cases,' says Grald.

'FLUENT-PLASMATOR ensures the best accuracy because the plasma chemistry database is constantly being updated as new experimental measurements and ab-initio quantum-chemical computations are made,' says Gabriel Font, Senior Scientist, Kinema Research & Software.
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