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Greene, Tweed introduces low-metallic-ion seals
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Greene Tweed & Co Benelux BV
: 22 May, 2006 (Company News) |
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In response to growing customer demand for a softer high-performance seal, Greene, Tweed announces Chemraz 656, an advanced perfluoroelastomer offering unsurpassed resistance to the harsh chemicals common in today's semiconductor processes. With its low-metallic-ion content (<5355 ppb), Chemraz 656 provides a high-purity seal that virtually eliminates the risk of contamination. |
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In response to growing customer demand for a softer high-performance seal, Greene, Tweed announces Chemraz 656, an advanced perfluoroelastomer offering unsurpassed resistance to the harsh chemicals common in today's semiconductor processes. With its low-metallic-ion content (<5355 ppb), Chemraz 656 provides a high-purity seal that virtually eliminates the risk of contamination.
The 70 durometer (Shore A) material was developed to meet the evolving needs of the semiconductor industry for increased reliability in harsher processing environments. 'Chemraz 656 is the perfect choice for applications having low sealing forces and low tolerance stackups, including bonded slit valve gates, chamber and window seals, gas inlet seals, and lid seals,' said Phil Paino, president of Greene, Tweed and head of its semiconductor business.
Offering stable operation at service temperatures up to 450°F (232°C), Chemraz 656 is compatible with most semiconductor processes, including chemical vapor deposition, dry plasma etching, rapid thermal processing, and diffusion.
Greene, Tweed leverages expertise in a variety of markets and products to give customers the most innovative solutions to meet performance challenges and reduce total cost of operation. With fully qualified engineering, sales and support personnel located throughout the Americas, Europe and Asia, Greene, Tweed delivers solutions to individual customer applications on a global scope. Greene, Tweed products are sold and distributed worldwide. For additional information, contact Greene, Tweed at +1.215.256.9521. |
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