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News

New Generation-F designed to lower chamber cleaning cost of ownership

BOC Gases : 22 September, 2006  (New Product)
BOC Edwards, a leading supplier of materials, equipment and services to the flat panel display manufacturing industry, announced today the launch of the Generation-F 1600, a new addition to its family of on-site fluorine generators. The Generation-F 1600 will be introduced at FPD TAIWAN 2005.
BOC Edwards, a leading supplier of materials, equipment and services to the flat panel display manufacturing industry, announced today the launch of the Generation-F 1600, a new addition to its family of on-site fluorine generators. The Generation-F 1600 will be introduced at FPD TAIWAN 2005.

Development of this system follows the introduction of the Generation-F80 and the Generation-F400, the first commercial on-site fluorine generators specifically designed for the chemical-vapor deposition chamber cleaning market. The Generation-F1600 integrates on-demand electrolytic fluorine production with purification and compression in a compact, ventilated enclosure and delivers up to 65 kg of high-purity fluorine per day to the process tool. With its high capacity output, the Generation-F1600 is the first BOC Edwards generator specifically designed to support fluorine plasma cleaning of liquid crystal display tool platforms. “The new Generation-F 1600 is designed to drive down the cost of cleaning the larger sized CVD chambers used in Generation 6, 7 and 8 fabs,” said Graham Hodgson, BOC Edwards general manager, fluorine.

“We’re looking forward to showing FPD Taiwan visitors this exciting addition to our product line,” Hodgson said, “and demonstrating how this high- flow system reduces chamber cleaning cost of ownership versus nitrogen trifluoride for the large scale cleaning applications used in the LCD industry.”
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