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News

New Polytec Microscope-based vibration and motion analyzers

POLYTEC GMBH : 11 June, 2006  (New Product)
For full-field vibration analysis on very small objects such as MEMS optical switches, Polytec has developed the MSV-400 Microscope Scanning Vibrometer, a successor of the awardwinning MSV-300. The laser beam, delivered through the optics of a standard microscope, can scan an object up to 320 x 240 μm with a lateral resolution of about 1 μm. The new MSV-400 is the ideal tool for research on structures that are too small for analyzing with the standard PSV-400 Scanning Vibrometer. Polytec's MSV-400 is the perfect instrument for a quick and accurate vibration and motion analysis of unpackaged MEMS devices. For waferlevel testing, the MSV-400 can easily be mounted onto manual or fully automated probestations.
Polytec presents a new generation of its proven and awarded microscope-based vibration and motion measurement systems on the basis of completely new designed system components. The new generation comprises the

- MSV-400 Microscope Scanning Vibrometer, the
- PMA-400 Planar Motion Analyzer and the
- MMA-400 Micro Motion Analyzer

MSV-400 Microscope Scanning Vibrometer
For full-field vibration analysis on very small objects such as MEMS optical switches, Polytec has developed the MSV-400 Microscope Scanning Vibrometer, a successor of the awardwinning MSV-300. The laser beam, delivered through the optics of a standard microscope, can scan an object up to 320 x 240 μm with a lateral resolution of about 1 μm. The new MSV-400 is the ideal tool for research on structures that are too small for analyzing with the standard PSV-400 Scanning Vibrometer. Polytec's MSV-400 is the perfect instrument for a quick and accurate vibration and motion analysis of unpackaged MEMS devices. For waferlevel testing, the MSV-400 can easily be mounted onto manual or fully automated probestations.

The new PMA-400 Planar Motion Analyzer is designed for in-plane microstructure vibration and motion analysis. In-plane measurements of microscopic structures such as MEMS or MOEMS require specialized techniques. While Laser Doppler Vibrometry provides superior resolution for out-of-plane measurements, the PMA-400 features in-plane motion analysis using specialized stroboscopic video microscopy.

The PMA-400 Planar Motion Analyzer is a fully integrated, high performance imaging system combining drive electronics, data acquisition and motion analysis software. The system includes high-speed imager, stroboscopic illumination source, Data Management System with data acquisition, and synchronized signal generator.

Motion data based on pixel deviations are extracted and displayed as X, Y displacement values or as Bode diagrams, Step-response plots, Ring-down plots, or Trajectory plots. Subpixel resolution enables the measurement of vibration amplitudes with resolution better than 10 nm in a frequency range up to 2 MHz.

Polytec's new MMA-400 Micro Motion Analyzer is designed for combined out-of-plane and inplane vibration and motion analysis of microstructures and broadens Polytec's product range for a full insight into the dynamics of the micromechanical world. The MMA-400 Micro Motion Analyzer features a modular concept combining the MSV-400 Microscope Scanning Vibrometer and the PMA-400 Planar Motion Analyzer. Whether out-ofplane-, in-plane- or 3D vibration measurements are of interest, the system can be configured to meet every need. The combination of two different measurement technologies Laser Doppler Vibrometry and video microscopy - provides superior performance compared to single-technology solutions for investigating the vibrational behavior of small structures.

LDV allows for a very fast identification of in-plane resonances through their parasitic out-ofplane contributions. The in-plane motion of the resoncances is subsequently investigated with the stroboscopic video microscopy in great detail.
Polytec GmbH is providing world class high-tech solutions for the microstructure, data storage, automotive, aerospace, transportation, steel industry, mechanical engineering and scientific research markets for decades. Polytec is known throughout the high-tech world for its leadership in the design and manufacture of laser-based vibration, speed & length measurement instruments. Global sales offices are located throughout Europe, the United States and Japan.
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