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News

Recent Process developments have stretched the capability of traditional cryopump technology

BOC Gases : 16 July, 2001  (New Product)
A new water vapor pump which can handle situations beyond the scope of conventional turbomolecular and cryopumps has just been launched by BOC Edwards.
Combined with a turbo pump or point-of-use dry pump, the MicroStar provides significant benefits over conventional configurations including faster pumpdown, safe handling of oxygen, and low cost of ownership, the MicroStar uses only 300W of power in normal operation, compared to 3kW for a typical cryopump.

The MicroStar is a compact self-contained device which offers outstanding water pumping performance without the need for a separate bulky helium compressor. It has a wide range of uses, especially in load lock applications and physical vapor deposition processes found in semiconductor manufacturing, where moisture contamination is an issue.

The key feature of the MicroStar is the on-board compressor that can chill a cold panel to 120 K. Unlike the colder cryopump systems which capture all gas species, this temperature selectively captures water molecules which can account for 85% of the gas load at pressures of 10-3 mbar and below.

The small compressor contributes to the compact design and enables big savings in cost and space as there is no need for a large helium compressor in the subfab or long connecting forelines.
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