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News

South Korea facility is the world

BOC Gases : 23 September, 2006  (Company News)
BOC Edwards, an integrated supplier of gas, chemical, vacuum and exhaust management solutions to the flat panel and semiconductor industries, has received a major vacuum systems order from Samsung Electronics. Over 60 vacuum systems will be supplied for Samsung
BOC Edwards, an integrated supplier of gas, chemical, vacuum and exhaust management solutions to the flat panel and semiconductor industries, has received a major vacuum systems order from Samsung Electronics. Over 60 vacuum systems will be supplied for Samsung’s Generation 7 thin film transistor-liquid crystal display manufacturing facility in Taenjong, South Korea.

The order, includes BOC Edwards modular iHxK dry vacuum pumping systems for harsh duty plasma-enhanced chemical-vapor deposition processes, the recently-introduced iFXK1 pump for loadlock applications, as well as high-speed, magnetically levitated turbomolecular pumps for plasma etch tools.

“We continue to enjoy great success in this incredibly dynamic market sector by providing cost-effective, innovative products, combined with a world-class global service and support network,” said J.Y. Kim, president of BOC Edwards vacuum products group in Korea. “By maintaining close relationships with flat panel display end users and FPD process tool manufacturers, our product roadmap beyond Generation 7 is well aligned with the anticipated rapid upsizing in panel dimensions.”
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