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News

Successful qualification program indicates F80 good complement to TELFORMULA platform

BOC Gases : 27 September, 2006  (Company News)
BOC Edwards, a global supplier of materials and subsystems for electronics manufacturing, announced today it has successfully completed a two-year fluorine qualification program with Tokyo Electron Limited, Japan, a major manufacturer of semiconductor production equipment. The BOC Edwards' Generation-F80 prototype fluorine generator has supplied up to 80 l/hr to multiple TELFORMULA 300 mm LPCVD tools at TEL/AT's Tohoku, Japan facility.
BOC Edwards, a global supplier of materials and subsystems for electronics manufacturing, announced today it has successfully completed a two-year fluorine qualification program with Tokyo Electron Limited, Japan, a major manufacturer of semiconductor production equipment. The BOC Edwards' Generation-F80 prototype fluorine generator has supplied up to 80 l/hr to multiple TELFORMULA 300 mm LPCVD tools at TEL/AT's Tohoku, Japan facility.

'We have experienced good cleaning performance in the process developed for the TELFORMULA tool using BOC Edwards on-site fluorine generation system,' said Yasuyuki Kuriki, TEL vice president and general manager, thermal processing systems. 'On-site fluorine generation represents a new paradigm for the industry's chamber cleaning requirements, and BOC Edwards has brought excellent service and fluorine expertise to the effort.'

On-site fluorine generation provides the semiconductor industry with an alternative to PFC-based chamber cleans. BOC Edwards has developed fluorine supply solutions that incorporate product delivery, maintenance, service and abatement components. 'Fluorine gas supplied in this way has the potential to offer a substantial reduction in the cost of ownership compared with other perfluorocarbons and cylinder fluorine,' said Noel Leeson, president of electronic materials for BOC Edwards. “Our experience in providing fluorine generation systems includes commercial installations in 300 mm production fabs and large-scale systems for LCD plants.'
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